Metal Sealed Thermal Mass Flow Controller


Metal Sealed Thermal Mass Flow Controller

Highest-purity flow path. Ultra-precise, and contaminant-free control.

Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control.  The use of expensive ultra-pure gases and liquid precursors demands the use of a Metal Sealed Thermal Mass Flow Controller.  Brooks Instrument meets those needs with our game-changing metal sealed thermal mass flow controllers and meters. Therefore, precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. As a result, purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media.


  • Silicon semiconductor device fabrication processes – Etch, Strip, CVD, ALD, PVD, Epi, Diffusion, Implant and RTP
  • Compound semiconductor device fabrication processes – MOCVD
  • Precision engineered surface coatings
  • Analytical systems
  • Vacuum processes applications

Select the mass flow device that best serves your process requirements.

This product requires detailed information.  We’d feel better if we could talk to you first.  Fill out the form and let us know how best to get in touch with you.

[contact-form to=”[email protected]” subject=”I am interested in the Brooks Metal Sealed Thermal MFC”][contact-field label=”Name” type=”name” required=”1″][contact-field label=”Email” type=”email” required=”1″][contact-field label=”Phone” type=”text” required=”1″][contact-field label=”Address” type=”textarea” required=”1″][/contact-form]