High Temperature Thermal Mass Flow Controllers


Highest-purity flow path for challenging high-temperature applications.

Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control.  Expensive ultra-pure gases and liquid precursors demand better control.  Brooks Instruments meet those needs with our high temperature metal sealed thermal mass flow meters and controllers.  As a result, precise chemistry control is achieved through the combination of ultra-stable and highly accurate measurement sensors.  Our MFCs have fast precision control valves as well as powerful digital electronics.  Furthermore, purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, and all-metal wetted flow path.  They are designed to keep outside contaminants, like moisture and oxygen, from corrupting the process media.


  • Optical fiber manufacturing for high temperature flow meters – MCVD
  • Silicon semiconductor device fabrication processes
    • CVD (precursor delivery in vapor form)
    • Strip (water vapor)
    • Etch (water vapor for passivation)

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