Description
Highest-purity flow path for challenging high-temperature applications.
Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control. Expensive ultra-pure gases and liquid precursors demand better control. Brooks Instruments meet those needs with our high temperature metal sealed thermal mass flow meters and controllers. As a result, precise chemistry control is achieved through the combination of ultra-stable and highly accurate measurement sensors. Our MFCs have fast precision control valves as well as powerful digital electronics. Furthermore, purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, and all-metal wetted flow path. They are designed to keep outside contaminants, like moisture and oxygen, from corrupting the process media.
KEY APPLICATIONS
- Optical fiber manufacturing for high temperature flow meters – MCVD
- Silicon semiconductor device fabrication processes
- CVD (precursor delivery in vapor form)
- Strip (water vapor)
- Etch (water vapor for passivation)
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