Description
Metal Sealed Thermal Mass Flow Controller
Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control. The use of expensive ultra-pure gases and liquid precursors demands the use of a Metal Sealed Thermal Mass Flow Controller. Brooks Instrument meets those needs with our game-changing metal sealed thermal mass flow controllers and meters. Therefore, precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. As a result, purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media.
KEY APPLICATIONS
- Silicon semiconductor device fabrication processes – Etch, Strip, CVD, ALD, PVD, Epi, Diffusion, Implant and RTP
- Compound semiconductor device fabrication processes – MOCVD
- Precision engineered surface coatings
- Analytical systems
- Vacuum processes applications
Select the mass flow device that best serves your process requirements.
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